Conference presenstations & Proceedings

132. Scale Dependence of Particle Removal Efficiency in PVA Brush Scrubbing

Somin Shin, Ji-Hun Jeong, Hyun Jun Ryu, Sanha Kim

oral presentation in International Conference on Planarization Technology (ICPT), Wiesbaden, Germany, October 2024.

131. Cu/Polymer CMP Technology for Heterogeneous Semiconductor Integration

Sukkyung Kang, Chan Su Jeon, Seulah Park, Juseong Park, Kyung Min Kim, Sanha Kim

oral presentation in CMPUGM, Suwon, South Korea, May 2024.

130. Maximizing Material Removal Efficiency of Micro-Structured Pads in Chemical Mechanical Polishing

Seounghee Yun, Hyun Jun Ryu, Sanha Kim

poster presentation in International Conference on Planarization Technology (ICPT), Wiesbaden, Germany, October 2024.

129. Static Friction of Magneto-Rheological Elastomer Pads in Wall-Climbing Robots

Seounghee Yun, Um Yong, Hae-Won Park, Sanha Kim

oral presentation in CIRP General Assembly, Bilbao, Spain, August 2024.

128. 수직이동로봇의 표면접착력 향상을 위한 자기유변탄성체 패드 최적 제작 방안

Seounghee Yun, Um Yong, Hae-Won Park, Sanha Kim

oral presentation in KSME, Busan, South Korea, May 2024.

127. Effect of Process Parameters on Material Removal in Chemical-Mechanical Polishing with Surface Structured Pads

Seounghee Yun, Hyun Jun Ryu, Sanha Kim

oral presentation in KTS, Jeju, South Korea, April 2024.

126. Material extrusion additive manufacturing of axial motor stators using custom-made PA12/Fe composite filaments

Taemin Kim, Hyeongmin Je, Kangyeon Kim, Jikang Kong, Minyoung Choi, Hyejoon Jun, Hyoungsoo Kim, Minkyun Noh, Sanha Kim

oral presentation in KSPE, Gyeongju, South Korea, November 2024. 

125. Optimization of Additives to Fabricate Fine-Grained Cu via Electroplating for Cu-Cu Direct Bonding

Jun-Hee Son, Jisoo Han, Hyun-Dong Lee, Sukkyung Kang, Sanha Kim, Hoo-Jeong Lee

poster presentation in International Symposium on Microelectronics and Packaging (ISMP), Busan, South Korea, November 2024. 

124. Ultrathin Nanoporous Cu with Lithiophilicity-Lithiophobicity Gradient by MWCNT for Anode-Free Li-Metal Battery Anode Current Collector 

Inyeong Yang, DongyeonWon, SukkyungKang, SanhaKim

poster presentation in KSME, Jeju, South Korea, November 2024.  

123. Precision Control of Dishing in Chemical Mechanical Polishing Using Surface Structured Pad for Hybrid Bonding

Seulah Park, Sukkyung Kang, Dong Geun Kim, Sanha Kim

poster presentation in KSME, Jeju, South Korea, November 2024.

122. Phase Analysis of Electrodeposited Cu/Zn Bi-material Surfaces and Their Impact on Lifespan as Lithium Metal Battery Anode Current Collectors

Hyunwoong Baek, Dong Geun Kim, Inyeong Yang, Dongyeon Won, Sanha Kim

poster presentation in KSME, Jeju, South Korea, November 2024.

121. Nano Sandpaper for Precise Surface Refinement Using Vertically Aligned Carbon Nanotubes

Sukkyung Kang, Hyun Jun Ryu, Ji-hun Jeong, Taehoon Kim, Sanha Kim

oral presentation in KSME, Jeju, South Korea, November 2024. 

120. Material extrusion additive manufacturing of axial motor stators using custom-made PA12/Fe filaments

Taemin Kim, Hyeongmin Je, Jikang Kong, Kangyeon Kim, Minyoung Choi, Hyejoon Jun, Hyoungsoo Kim, Minkyun Noh, Sanha Kim

poster presentation in KSME, Jeju, South Korea, November 2024.  

119. Soft Microstructured Surfaces with Ultrathin Hard Skin Fabricated by Stereolithography

Dong Geun Kim, Sukkyung Kang, Seulah Park, Sanha Kim

oral presentation in KSME, Jeju, South Korea, November 2024.  

118. 구리/폴리머 하이브리드 본딩 공정을 위한 고분자 표면의 화학적기계연마

Sukkyung Kang, Chan Su Jeon, Seulah Park, Juseong Park, Kyung Min Kim, Sanha Kim 

oral presentation in Korean Research Group for Polishing Technology (KRGPT), Daejeon, South Korea, October 2024.

117. Particle Removal Mechanism of Porous Brushes and Downscaling the Pore-Scale for High-Efficiency Cleaning in Post-CMP

Somin Shin, Dong Geun Kim, Sanha Kim

116. Gradient Hardness and CMP Characteristics of Micro-Patterned Pads Fabricated by 3D Printing

115. 다종금속 전착을 활용한 무음극 리튬금속전지 집전체의 표면개질

Inyeong Yang, Dong Geun Kim, Hyunwoong Baek, Sanha Kim

oral presentation in LG Energy Solutions 2nd Industry-Academic Cooperation Conference, Daejeon, South Korea, July 2024. 

114. 음극 집전체 친리튬 기능성 향상을 위한 이종금속 전착 및 특성 분석

Dong Geun Kim, Dongyeon Won, Inyeong Yang, Hyunwoong Baek, Sanha Kim

poster presentation in LG Energy Solutions 2nd Industry-Academic Cooperation Conference, Daejeon, South Korea, July 2024.

113. Ultrathin Nanofibrillar Cu Sheet Covered with Directly Grown Lithiophobic CNTs for Anode free Li metal Battery Anode Current Collectors

Inyeong Yang, Dongyeon Won, Sanha Kim

poster presentation in LG Energy Solutions 2nd Industry-Academic Cooperation Conference, Daejeon, South Korea, July 2024.

112. Development of Methodology for Predicting Friction Coefficient in Bolt and Coated/Uncoated Steel Plate Fastening

Hyena Hwang, Sukkyung Kang, Seounghee Yun, Sanha Kim

oral presentation in Korean Society of Automative Engineers (KSAE), Geoje, South Korea, June 2024.

111. Material Removal Rate in Chemical Mechanical Polishing according to Pad Surface Micro-Patterns  

Hyun Jun Ryu, Seounghee Yun , Ji-hun Jeong, Sanha Kim

oral presentation in KSME, Busan, South Korea, May 2024. 

110. Polishing Characteristics of Vat Photopolymerization Additive Manufactured CMP

Dong Geun Kim, Sanha kim

oral presentation in KSME, Busan, South Korea, May 2024.

109. Particle Removal Efficiency according to Pore Structures in PVA Brush Scrubbing 

Somin Shin, Sanha Kim

oral presentation in KSME, Busan, South Korea, May 2024.

108. 정밀가공된 CMP 패드의 미세돌기 형상에 따른 재료제거율

107. Hot embossing of electrospun nanofiber network for nanoporous flexography stamp

Yoon Sick Eom, Seong Jae Kim, Hyun Jun Ryu, Sanha Kim

106. Fabrication of High-Precision and Mid-Aspect Ratio Micro Cylindrical and Hemispherical Array Structures Utilizing Lithography Technology and Application of Chemical-Mechanical Polishing Process

Hyun Jun Ryu, Seounghee Yun, Ji-hun Jeong, Sanha Kim

105. Droplet morphology monitoring in inkjet printing using deep learning algorithm

Seong Jae Kim, Eunsik Choi, Kunsik An, Kyung-Tae Kang, Sanha Kim

104. Probability of impurity scratching according to pad surface properties in chemical-mechanical polishing 

Hyeongmin Je, Dong Geun Kim, Sanha Kim

103. Vat Photopolymerization Additive Manufacturing of CMP Pads with Precisely Controlled Surface Structures and their Polishing Characteristics 

Dong Geun Kim, Sanha Kim

102. Material extrusion additive manufacturing of axial motor stators using Fe particle embedded filaments

Taemin Kim, Hyeongmin Je, Jikang Kong, Kangyeon Kim, Minyoung Choi, Hyejoon Jun, Hyoungsoo Kim, Minkyun Noh, Sanha Kim

101. CMP Technology for Cu/Polymer in 3D Stacked Semiconductor Fabrication

Sukkyung Kang, Chan Su Jeon, Kyung Min Kim, Sanha Kim

100. Fabrication of Optimized Micro-Patterned Pad for High-Precision Chemical-Mechanical Polishing Process 

Hyun Jun Ryu, Seounghee Yun, Sanha Kim

99. Synthesis of porous PVA brush using NaCl sacrificial particles and characterization of its cleaning efficiency

98. Low-temperature polycrystalline Ge growth on PtSe2 for BEOL compatible devices   

Hwayong Choi, Sukkyung Kang, Minseung Gyeon, Yeji Kim, Minhyeok Jeong, Kibum Kang, Sanha Kim, Junseok Heo  

poster presentation in International Conference on Electronics, Information, and Communication (ICEIC) 2024, Taipei, Taiwan, January 2024 

97. CMP Technology for Cu/Polymer Hybrid Bonding  

Sukkyung Kang, Juseong Park, Chan Su Jeon, Kyung Min Kim, Sanha Kim 

oral prestation in Korean Conference on Semiconductors (KCS) 2024, Gyeongju, South Korea, January 2024. 

96. Material extrusion 3D printing of motor components using filaments with different magnetic compositions  

Hyeongmin Je, Taemin Kim, Kanyeong Kim, Minyoung Choi, Minkyun Noh, Sanha Kim 

95. Performance Analysis of Magnetorheological Elastomer Pads according to Material Characteristics  

94. Integration of Nanophotonic Structures with a Metallic Nanoporous Air Filter for Particulate Matter Monitoring   

93. Additive Material Transfer Using On-Demand Adhesion Modulation in a Self-assembled Nanofluidic Structure   

92. Ultrathin Nanofibrillar Cu Sheet Covered with Directly Grown Lithiophobic CNT for Anode-Free Li-Metal Battery Anode Current Collectors  

Inyeong Yang, Dongyeon Won, Sukkyung Kang, Sanha Kim 

poster presentation in Material Research Society (MRS) 2023 Fall, Boston, MA, USA, November 2023. 

91. Rigid and Tough Composite Additive Manufacturing using Co-Axial Material Extrusion of Hard Thermoplastic and Soft Elastomer  

Taemin Kim, Sanha Kim 

poster presentation in Material Research Society (MRS) 2023 Fall, Boston, MA, USA, November 2023. 

*received Best Poster Award. 

*featured at KAIST ME news (link)

90. Electrospun hydrogel nanoporous scaffold for cleaning ultrafine contaminants in semiconductor manufacturing  

Somin Shin, Ji-hun Jeong, Sanha Kim 

poster presentation in Material Research Society (MRS) 2023 Fall, Boston, MA, USA, November 2023. 

89. Plasma etched vertically aligned carbon nanotube embedded polyurethane surface for precision semiconductor wafer polishing  

Sukkyung Kang, Ji-hun Jeong, Hyun Jun Ryu, Dongyeon Won, Sanha Kim 

poster presentation in Material Research Society (MRS) 2023 Fall, Boston, MA, USA, November 2023. 

*received Outstanding Student Poster Award.

*featured at KAIST ME news (link)

88. Demonstration of ruthenium passivation for Cu-to-Cu direct bonding 

Myeongeun Kim, Sukkyung Kang, Sanha Kim, Kyung Min Kim 

oral presentation in The 7th International Conference on Advanced Electromaterials(ICAE 2023), Jeju, South Korea, November 2023. 

87. Characterization of vat photopolymerization additively manufactured CMP pads 

Dong Geun Kim, Sanha kim 

86. A predictive model for scratch defect numbers according to CMP Pads 

85. Plasma-Assisted CMP for Planarization of Adhesive Polymers in 3D Stacked Semiconductor Devices  

84. Co-axial multi-material extrusion 3D printing for extreme behavior of rigid and super-ductile thermoplastic polymers  

83. Advanced polishing technology using vertically aligned carbon nanotube thin films 

Sukkyung Kang, Ji-hun Jeong, Sanha Kim 

poster presentation in Advanced Epitaxy for Freestanding Membranes and 2D Materials (AEFM), Seoul, South Korea, July 2023 

82. Local electric field concentration via surface nanostructures inside Cu current collector for high performance Li-metal battery anode 

Inyeong Yang, Ji-hun Jeong, Jae Young Seok, Sanha Kim 

oral presentation in Nanokorea, Ilsan, South Korea, July 2023 

81. Surface modification of lithium metal battery anode current collector using Cu/Zn bi-metal electrodeposition 

Dongyeon Won, Inyeong Yang, Sanha Kim 

poster presentation in Korean Society for Precision Engineering / KSPE 2023 spring, Jeju island, May 2023 

80. Design and manufacturing of copper current collector for dendrite formation suppression in lithium-metal battery anodes   

Inyeong Yang, Ji-hun Jeong, Jae Young Seok, Sanha Kim 

oral presentation in Korean Society for Precision Engineering / KSPE 2023 spring, Jeju island, May 2023 

*recived Best Paper Award

79. Micro-structured pads for chemical-mechanical polishing fabricated by photopolymerization additive manufacturing 

78. Fracture and wear behavior of hard-on-soft bi-layered polyurethane surfaces 

77. Self-pressure regulating CMP process for hybrid Cu/polymer bonding 

76. Characterization of friction between bolts and coated steel plates 

75.Effect of coating hardness and thickness on friction in bolt fastening 

74. Shear-adhesive soft robotic gripper integrated with deformable interdigitated circuit  

73. Vision based quality feedback and process optimization for 5-axis CNC milling 

72. Manufacturing of structurally hierarchical copper surface for high performance lithium-metal battery anode current collectors

71. Laser patterning to suppress dendrite growth on zinc metal anodes 

70. An accelerated convolutional neural network for droplet classification in inkjet printing 

69. Manipulating pore sizes in PVA brush

68. Manufacturing of bi-layered copper nanostructural thin sheet using electrodeposition and its application for high efficient particulate air filter 

67. Programming tensile behavior of material extruded thermoplastic filaments via hydrogen bonded co-axial interface 

66. Filter unit design fabricated by copper nanofibrous filter and application to vehicle defroster

65. Co-axial multi-material extrusion 3D printing with programmable mechanical properties 

64. Polymer/Cu hybrid CMP process for high-reliability of Cu direct bonding 

63. Friction variation in bolt fastening according to contact surface profiles 

62. Development of friction model for optimal fastening torque prediction 

61. Structural characterization and manipulation of porous PVA brush for high-efficient wafer surface cleaning

60. Evaluation of polishing performance by CMP pad with bi-layered asperities

59. Fabrication and Characterization of Fixed-Nano-Abrasive Polishing Pads using Vertically Aligned Carbon Nanotubes

58. Predictive model for bearing torque in bolt fastening

57. Nanostructured Cu Mesh with Melt-infused Li for Lithium Metal Battery Anode 

56. The Effect of Structural  Properties for Cleaning Performance of PVA brush during Post-CMP

55. Automated Material Extrusion 3D printing using Electroadhesive Heating Bed 

52. Structurally tailored hierarchical Cu current collector for supressing dendrite failure in lithium metal batteries

51. Engineered vertically-aligned CNT for plasmon-enhanced optical sensing with programmable molecular delivery

50. Compressive Mechanical Behavior of Electrospun Hydrophobic Nanofibrous Pad

49. Smart 3D Printing via In-situ Monitoring and Optimization of Filament Extrusion

48. Predictive Model for Bearing Torque in Bolt Fastening 

47. Tailoring and Reverse Engineering of Tensile Behavior in Additively Manufactured Elastomeric Meshes

46. Fabrication of Cu Nanoporous Filter using Electrodeposition and its Characterization

45. Structurally Hierarchical Carbon Nanostube Embedded Copper Current Collector for Lithium Metal Battery Anodes with High Cycle Life/High Coulombic Efficiency

44. Active Friction Control of Additively Manufactured 3D Surface Electrode Structures

43. Fabrication of carbon nanotube based nanoporous 3D micro structures and characterization of its surface polishing behavior

42. Characterization of Geometrical Design Parameters on Aspiration Performances of Medical Liposuction Devices

41. Fabrication of carbon nanotube scaffold arrays for SERS molecular sensing.

40. Abrasive Wear and Surface Polishing by Vertically Aligned Carbon Nanotubes

39. Effect of bolt surface properties on characteristics of tightening friction

38. Additively Manufacturing of Smart Gripping Surfaces Enabling Active Control of Adhesion and Tactile Sensing

37. Prediction of underhead friction coefficient in bolt tightening 

36. Abrasive polishing using composite pads with fixed vertically aligned carbon nanotubes

35. Re-entrant corrugated CNT arrays for self-enrichment assisted femto-molar molecular sensing

34. Fabrication of Cu Nanoporous Filter using Electrodeposition and its Characterization

33. Fabrication of fixed-abrasive pads using vertical aligned CNTs and analysis of its mechanical polishing performances

32. Characteristics of tightening friction by surface topography of bolt underhead

31. Chemical-mechanical polishing of soft pad asperity with protective hard thin film

30. Surface-enhanced Raman scattering on the warped nanopatterns fabricated by multiple exposure interference lithography

29. Characterization of CMP process at single contact point of pad micro-asperity 

28. Multi-angle exposure in laser interference lithography for high performance reproducible SERS Biosensors

27. Additive manufacturing of 3D surface structures for electromechanical adhesion and tactile sensing

26. Ink transfer in ultrathin flexographic printing using nanoporous stamps 

25. Transfer printing of micro/nano-materials using nanocomposite electroadhesives 

24. Liquid transfer in nanoporous printing stamps

23.  Printing colloidal quantum dot spectrometer using nanoporous flexography

22. Printing of ultra-thin layers of colloidal inks using nanoporous stamps for high resolution flexography

21. Soft composite nanofoams with electrically switchable adhesion for micro transfer printing

20. Continuous-feed Electromechanical transfer printing of graphene

19. Controlling liquid imbibition and droplet adhesion using carbon nanotube surfaces

18. Nanoscale ink transfer in high-resolution flexographic printing using nanoporous stamps

17. Synthetic butterfly-inspired scale surfaces with tunable complance and anisotropic droplet adhesion

16. Plate to roll apparatus for continuous relief printing using microstructured nanoporous stamps

15. Micrometer resolution flexoprinting of conductive inks using engineered carbon nanotube stamps

14. Direct printing of transparent silver honeycomb electrodes using nanoporous stamps

13. Scalable fabrication of stimuli-responsive liquid crystalline polymer microstructures by replica molding

12. Design and scalable fabrication of biomimetic microstructures by strain-engineered growth of carbon nanotubes

11. Preventing densification and elastocapillary self-assembly of carbon nanotube forests for applications in oleophobic surfaces and nanoporous stamps

10. Direct printing of sub-10µm metallic nanoparticle patterns using engineered nanoporous stamps

9. Manufacturing of stimuli-responsive liquid crystalline polymer microstructures by replica molding

8. Lightdriven actuation of microstructured liquid crystalline polymer networks

7. Polymer-coated carbon nanotube arrays as a stamp for micro-contact printing

6. The effect of pad-asperity curvature on materical removal rate in chemical-mechanical polishing

5. The effect of pad surface plasticity in chemicalmechanical polishing

4. Scratching of patterned composite surfaces by pad asperities in chemical-mechanical polishing

3. The effect of mechanical and tribological properties of coatings on scratch generation in chemical-mechanical polishing

2. Taper removal of hole entrance in micro drilling using a nanosecond pulsed laser

1. Fabrication of micro groove using hybrid of laser beam and electrical discharge machining